SEMI F19-2004 标准详情
- 标准号:SEMI F19-2004
- 中文标题:规范的湿润表面的不锈钢部件的表面状况
- 英文标题:SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS
- 标准类别:国际半导体设备与材料协会
- 发布日期:2004-03-01
Gives a standard for the quality of the internal/wetted surfaces of electropolished 316L stainless steel components for use in chemical liquid and gas distribution systems of semiconductor manufacturing facilities. It defines the wetted surface chara
* 特别声明:资源收集自网络或用户上传,本网站所提供的电子文本仅供参考,请以正式出版物为准。仅供个人标准化学习,研究使用。如有侵权,请及时联系我们!