SEMI F14-1993 标准详情
- 标准号:SEMI F14-1993
- 中文标题:GUIDE FOR气源设备外壳的设计
- 英文标题:GUIDE FOR THE DESIGN OF GAS SOURCE EQUIPMENT ENCLOSURES
- 标准类别:国际半导体设备与材料协会
- 发布日期:1993-01-01
Defines gas source equipment enclosure design considerations. It is for use by purchasers and manufacturers. Modifications needed to facilitate specific gases, unusual applications or cylinders are not covered.
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