SEMI D23-1999 标准详情
- 标准号:SEMI D23-1999
- 中文标题:GUIDE出于费用的设备所有权( CEO)计算FPD设备
- 英文标题:GUIDE FOR COST OF EQUIPMENT OWNERSHIP (CEO) CALCULATION FOR FPD EQUIPMENT
- 标准类别:国际半导体设备与材料协会
- 发布日期:1999-09-01
Focuses on each equipment in the FPD production line. Defines the calculation method for cost of installing/operating that equipment, to define the calculation method for productivity of that equipment, and to quantify CEO of that equipment.
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