SEMI E91-2000 标准详情
- 标准号:SEMI E91-2000
- 中文标题:
- 英文标题:Specification For Prober Specific Equipment Model (psem)
- 标准类别:国际半导体设备与材料协会
- 发布日期:
Sets up a Specific Equipment Model for prober equipment (PSEM). The PSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and addi
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