SEMI M53-2006 标准详情
- 标准号:SEMI M53-2006
- 中文标题:
- 英文标题:Practice For Calibrating Scanning Surface Inspection Systems Using Certified Depositions Of Monodisperse Polystyrene Latex Spheres On Unpatterned Semiconductor Wafer Surfaces
- 标准类别:国际半导体设备与材料协会
- 发布日期:
Describes calibration of SSIS dark field channels so that the SSIS accurately sizes PSL spheres deposited on unpatterned polished, epitaxial, or filmed semiconductor wafer surfaces.
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