DIN 50450-7
DIN 50450-7 标准详情
- 标准号：DIN 50450-7
- 中文标题：
- 英文标题：Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 7: Determination of CO and H<(Index)2> in nitrogen by gaschromatography and reduction gasdetector
- 标准类别：德国标准DIN
- 发布日期：
内容简介
The method serves to determine the volume fractions of CO and H[2] in nitrogen, in amounts of 0,05 to 1 mul/l, used as carrier gas or doping gas in semiconductor technology. Its applicability to other gases and lower limits of detection should be est
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