SEMI F34-1998 标准详情
- 标准号:SEMI F34-1998
- 中文标题:GUIDE FOR液体化工管道贴标
- 英文标题:GUIDE FOR LIQUID CHEMICAL PIPE LABELING
- 标准类别:国际半导体设备与材料协会
- 发布日期:1998-09-01
Recommends a scheme for labeling liquid process chemical piping systems used in semiconductor manufacturing facilities and equipment. It is applicable to components normally found in a liquid process chemical piping system for semiconductor manufactu
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