ASTM F951-1996 标准详情
- 标准号:ASTM F951-1996
- 中文标题:测定硅片径向晶隙氧变化的标准试验方法
- 英文标题:standard test method for variation of determination of radial interstitial oxygen variation in silicon wafers
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1996
1.1 This test method covers test site selection and data reduction procedures for radial variation of the interstitial oxygen concentration in silicon slices typically used in the manufacture of microelectronic semiconductor devices.1.2 This test met
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