BS EN ISO 14644-10-2013 标准详情
- 标准号:BS EN ISO 14644-10-2013
- 中文标题:洁净室和相关控制环境.通过化学浓缩进行表面清洁度分类
- 英文标题:Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration
- 标准类别:英国标准BS
- 发布日期:2013-04-30
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
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