ASTM F1513-1999 标准详情
- 标准号:ASTM F1513-1999
- 中文标题:电子薄膜器件用纯铝(非合金)原材料标准规范
- 英文标题:Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1999
1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example,
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