DIN EN 62047-11 (2014-04) 标准详情
- 标准号：DIN EN 62047-11 (2014-04)
- 中文标题：
- 英文标题：Semiconductor Devices - Micro-electromechanical Devices - Part 11: Test Method For Coefficients Of Linear Thermal Expansion Of Free-standing Materials For Micro-electromechanical Systems (iec 62047-11:2013)
- 标准类别：德国标准DIN
- 发布日期：
