SS EN 62047-11 Ed. 1 标准详情
- 标准号:SS EN 62047-11 Ed. 1
- 中文标题:
- 英文标题:Semiconductor Devices - Micro-Electromechanical Devices - Part 11: Test Method For Coefficients Of Linear Thermal Expansion Of Free-Standing Materials For Micro-Electromechanical Systems
- 标准类别:新加坡SS
- 发布日期: