OVE/ONORM EN 62047-11-2014 标准详情
- 标准号：OVE/ONORM EN 62047-11-2014
- 中文标题：
- 英文标题：Semiconductor Devices - Micro-Electromechanical Devices - Part 11: Test Method For Coefficients Of Linear Thermal Expansion Of Free-Standing Materials For Micro-Electromechanical Systems (Iec 62047-11:2013)
- 标准类别：奥地利国家标准ONORM
- 发布日期：
