SEMI E153-2010 标准详情
- 标准号:SEMI E153-2010
- 中文标题:规范AMHS SEM ( AMHS SEM )
- 英文标题:SPECIFICATION FOR AMHS SEM (AMHS SEM)
- 标准类别:国际半导体设备与材料协会
- 发布日期:2010-03-01
Sets up a Specific Equipment Model (SEM) for AMHS (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities.
* 特别声明:资源收集自网络或用户上传,本网站所提供的电子文本仅供参考,请以正式出版物为准。仅供个人标准化学习,研究使用。如有侵权,请及时联系我们!