ASTM F390-1998 标准详情
- 标准号:ASTM F390-1998
- 中文标题:用共线四探针法对金属薄膜的薄膜耐力的试验方法
- 英文标题:Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1998
1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material
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