SS EN ISO 14644-10 Ed. 1 标准详情
- 标准号:SS EN ISO 14644-10 Ed. 1
- 中文标题:
- 英文标题:Cleanrooms And Associated Controlled Environments - Part 10: Classification Of Surface Cleanliness By Chemical Concentration (Iso 14644-10:2013)
- 标准类别:新加坡SS
- 发布日期:
Specifies the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
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