ISO/TTA 4-2002 标准详情
- 标准号:ISO/TTA 4-2002
- 中文标题:硅基质上薄膜导热性的测量
- 英文标题:Measurement of thermal conductivity of thin films on silicon substrates
- 标准类别:国际标准化组织标准ISO
- 发布日期:2002-11
TTA 4:2002 proposes a standard procedure for the three-omega method for measuring the thermal conductivity of a thin, electrically insulating film, on a substrate having a thermal conductivity significantly greater than the thermal conductivity of th
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