ASTM F1811-1997(2002) 标准详情
- 标准号:ASTM F1811-1997(2002)
- 中文标题:从表面轮廓数据估测功率谱密度函数和有关的精整参数的标准指南
- 英文标题:Standard Practice for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1997
This standard was transferred to SEMI (www.semi.org) May 20031.1 This practice defines the methodology for calculating a set of commonly used statistical parameters and functions of surface roughness from a set of measured surface profile data. Its p
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