UNI EN ISO 14644-10-2013 标准详情
- 标准号:UNI EN ISO 14644-10-2013
- 中文标题:
- 英文标题:Cleanrooms And Associated Controlled Environments - Part 10: Classification Of Surface Cleanliness By Chemical Concentration
- 标准类别:意大利UNIUNI
- 发布日期:
Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).
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