DIN EN 62047-16 标准详情
- 标准号:DIN EN 62047-16
- 中文标题:
- 英文标题:Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods (IEC 47F/125/CD:2012)
- 标准类别:德国标准DIN
- 发布日期: