SEMI E152-2009 标准详情
- 标准号:SEMI E152-2009
- 中文标题:EUV POD的FOR 150毫米EUVL标线机械规格
- 英文标题:MECHANICAL SPECIFICATION OF EUV POD FOR 150 mm EUVL RETICLES
- 标准类别:国际半导体设备与材料协会
- 发布日期:2009-07-01
Describes EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle, used to ship, transport and store a 6-inch reticle. The EUV Pod consists of an outer pod and a protective inner pod. The EUV Pod is to be used when a conventional reticl
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