IEC 62047-3 Ed. 1.0 标准详情
- 标准号:IEC 62047-3 Ed. 1.0
- 中文标题:
- 英文标题:Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
- 标准类别:国际电工委员会IEC
- 发布日期:
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectr
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