SEMI D21-2006 标准详情
- 标准号:SEMI D21-2006
- 中文标题:术语FPD掩模图形精度
- 英文标题:TERMINOLOGY FOR FPD MASK PATTERN ACCURACY
- 标准类别:国际半导体设备与材料协会
- 发布日期:2006-07-01
Describes terminology for FPD masks. Also intended that the concepts of terms which should be used at the technical conferences, business discussion, etc are clarified and that standardization as to masks will be promoted.
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