SEMI F15-2008 标准详情
- 标准号:SEMI F15-2008
- 中文标题:测试方法(SF6示踪气体)机柜的已移至SEMI S6
- 英文标题:TEST METHOD (SF6 TRACER GAS) FOR ENCLOSURES HAS BEEN MOVED TO SEMI S6
- 标准类别:国际半导体设备与材料协会
- 发布日期:2008-03-01
Provides a permanent withdrawal notice for SEMI F15 indicating that the technical content has been superseded by Appendix 2, Test Method for Determining Fugitive Emissions by Using Tracer Gas of SEMI S6.
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