BS IEC 62047-30-2017 标准详情
- 标准号:BS IEC 62047-30-2017
- 中文标题:
- 英文标题:Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
- 标准类别:英国标准BS
- 发布日期:09 October 2017