ASTM F815-1988(1993)e1 标准详情
- 标准号:ASTM F815-1988(1993)e1
- 中文标题:用于检测外延尖峰的测试方法
- 英文标题:Test Method for Detection of Epitaxial Spikes
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1988
1.1 This test method covers the detection of epitaxial spikes on silicon wafers. It is applicable to any wafer diameter or surface orientation. 1.2 This test method is a pass or fail test for the presence of spikes on a wafer. If there are relative
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