ASTM F1367-1998 标准详情
- 标准号:ASTM F1367-1998
- 中文标题:薄膜设备用铬喷镀极
- 英文标题:Standard Specification for Chromium Sputtering Targets for Thin Film Applications
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1998
1.1 This specification covers sputtering targets fabricated from chromium metal. 1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements. 1.3 The values stated in SI units are regarded as
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