ASTM F1261M-1996(2003) 标准详情
- 标准号:ASTM F1261M-1996(2003)
- 中文标题:薄膜金属直线平均电宽度测定的标准试验方法
- 英文标题:Standard Test Method for Determining the Average Electrical Width of a Straight, Thin-Film Metal Line [Metric]
- 标准类别:美国材料与试验协会ASTM
- 发布日期:1996
1.1 This test method is designed for determining the average electrical width of a narrow thin-film metallization line.1.2 This test method is intended for measuring thin metallization lines such as are used in microelectronic circuits where the widt
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